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| Author: | Grützner, Gabi; Fortagne, Olaf; Kern, Dieter P. | |
| Tübinger Autor(en): |
|
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| Alternative Title: | Special issue MNE 2011 - Part II | |
| Published in: |
Microelectronic engineering
(2012-10), Bd.
98,
S.
(102) |
|
| Verlagsangabe: | Amsterdam : Elsevier | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1016/j.mee.2012.08.001 | |
| ISSN: | 0167-9317 | |
| DDC Classifikation: | 530 - Physics | |
| Dokumentart: | Article | |
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